Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions
Published in Emerging Patterning Technologies 2018, 2018
Recommended citation: Zhou, C., Kurosawa, T., Dazai, T., Doise, J., Ren, J., Bezik, C., … Nealey, P. F. (2018). Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions. In E. M. Panning & M. I. Sanchez (Eds.), Emerging Patterning Technologies 2018 (p. 19). SPIE. https://doi.org/10.1117/12.2297461 https://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems/volume-17/issue-3/031203/Studying-the-effects-of-chemistry-and-geometry-on-DSA-hole/10.1117/1.JMM.17.3.031203.full?SSO=1
My contributions to this paper include simulations of block copolymer directed self-assembly in the "hole-shrink" process, demonstrating that our coarse-grained simulations predict the same morphologies observed through direct imaging of 3D structures from experiments.
Recommended citation: Zhou, C., Kurosawa, T., Dazai, T., Doise, J., Ren, J., Bezik, C., … Nealey, P. F. (2018). Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions. In E. M. Panning & M. I. Sanchez (Eds.), Emerging Patterning Technologies 2018 (p. 19). SPIE. https://doi.org/10.1117/12.2297461